ultralow power consumption requirement of low throughput applications needs to operate circuits in subthreshold region where subthreshold leakage current is used as active current for necessary computations. This paper investigates the impact of interconnect drivers on digital circuit performance in subthreshold region. In particular, we have investigates the performance of Si-MOSFET and CNFETs at 32nm deep submicron technology node. Performance Analysis is carried out for different... Topics: Subthreshold, Ultra-low power, CNFET, Monte- Carlo analysis.